An SEM based system for a complete characterization of latch‐up in CMOS integrated circuits

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Bibliographische Detailangaben
Zeitschriftentitel:	Scanning
Personen und Körperschaften:	Canali, C., Fantini, F., Giannini, M., Senin, A., Vanzi, M., Zanoni, E.
In:	Scanning, 8, 1986, 1, S. 20-33
Format:	E-Article
Sprache:	Englisch
veröffentlicht:	Wiley
Schlagwörter:	Instrumentation Atomic and Molecular Physics, and Optics

Details
Zusammenfassung:	<jats:title>Abstract</jats:title><jats:p>An electron beam testing system was established for a complete and detailed analysis of latch‐up in CMOS integrated circuits. Problems which can be studied include: <jats:list list-type="explicit-label"> <jats:list-item><jats:p>identification of latch‐up current paths in steady state condition;</jats:p></jats:list-item> <jats:list-item><jats:p>measurement of the local latch‐up sensitivity of the various parts of the circuit;</jats:p></jats:list-item> <jats:list-item><jats:p>observation of the time evolution of latch‐up from the firing event to the final condition.</jats:p></jats:list-item> </jats:list></jats:p>
Umfang:	20-33
ISSN:	0161-0457 1932-8745
DOI:	10.1002/sca.4950080105