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Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma
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Journal Title: | Journal of Physics: Conference Series |
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Authors and Corporations: | , , , |
In: | Journal of Physics: Conference Series, 417, 2013, p. 012035 |
Type of Resource: | E-Article |
Language: | Undetermined |
published: |
IOP Publishing
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Subjects: |