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Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma
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| Zeitschriftentitel: | Journal of Physics: Conference Series |
|---|---|
| Personen und Körperschaften: | , , , |
| In: | Journal of Physics: Conference Series, 417, 2013, S. 012035 |
| Format: | E-Article |
| Sprache: | Unbestimmt |
| veröffentlicht: |
IOP Publishing
|
| Schlagwörter: |
| author_facet |
Otani, K Sakata, N Ozaki, T Kawabata, K Otani, K Sakata, N Ozaki, T Kawabata, K |
|---|---|
| author |
Otani, K Sakata, N Ozaki, T Kawabata, K |
| spellingShingle |
Otani, K Sakata, N Ozaki, T Kawabata, K Journal of Physics: Conference Series Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma General Physics and Astronomy |
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otani, k |
| spelling |
Otani, K Sakata, N Ozaki, T Kawabata, K 1742-6596 IOP Publishing General Physics and Astronomy http://dx.doi.org/10.1088/1742-6596/417/1/012035 Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma Journal of Physics: Conference Series |
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Journal of Physics: Conference Series |
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| title |
Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_unstemmed |
Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_full |
Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_fullStr |
Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_full_unstemmed |
Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_short |
Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_sort |
effects of magnetic flux density and substrate temperature on ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
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General Physics and Astronomy |
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http://dx.doi.org/10.1088/1742-6596/417/1/012035 |
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| author | Otani, K, Sakata, N, Ozaki, T, Kawabata, K |
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| institution | DE-Zwi2, DE-D161, DE-Zi4, DE-Gla1, DE-15, DE-Pl11, DE-Rs1, DE-14, DE-105, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1 |
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| spelling | Otani, K Sakata, N Ozaki, T Kawabata, K 1742-6596 IOP Publishing General Physics and Astronomy http://dx.doi.org/10.1088/1742-6596/417/1/012035 Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma Journal of Physics: Conference Series |
| spellingShingle | Otani, K, Sakata, N, Ozaki, T, Kawabata, K, Journal of Physics: Conference Series, Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma, General Physics and Astronomy |
| title | Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_full | Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_fullStr | Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_full_unstemmed | Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_short | Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_sort | effects of magnetic flux density and substrate temperature on ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| title_unstemmed | Effects of magnetic flux density and substrate temperature on Ni films prepared by means of unbalanced magnetron sputtering assisted by inductively coupled plasma |
| topic | General Physics and Astronomy |
| url | http://dx.doi.org/10.1088/1742-6596/417/1/012035 |