Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon

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Bibliographische Detailangaben
Zeitschriftentitel:	Advanced Electromagnetics
Personen und Körperschaften:	Yurchenko, V., Navruz, T. S., Ciydem, M., Altintas, A.
In:	Advanced Electromagnetics, 8, 2019, 2, S. 101-107
Format:	E-Article
Sprache:	Unbestimmt
veröffentlicht:	Advanced Electromagnetics
Schlagwörter:	Electrical and Electronic Engineering Radiation Electronic, Optical and Magnetic Materials

Details
Zusammenfassung:	<jats:p>We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces.</jats:p>
Umfang:	101-107
ISSN:	2119-0275
DOI:	10.7716/aem.v8i2.1127