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Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets
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| Zeitschriftentitel: | Journal of Surface Engineered Materials and Advanced Technology |
|---|---|
| Personen und Körperschaften: | , , |
| In: | Journal of Surface Engineered Materials and Advanced Technology, 2, 2012, 2, S. 115-119 |
| Format: | E-Article |
| Sprache: | Unbestimmt |
| veröffentlicht: |
Scientific Research Publishing, Inc.
|
| Schlagwörter: |
| author_facet |
Kovac, Julien Stock, Heinz-Rolf Zoch, Hans-Werner Kovac, Julien Stock, Heinz-Rolf Zoch, Hans-Werner |
|---|---|
| author |
Kovac, Julien Stock, Heinz-Rolf Zoch, Hans-Werner |
| spellingShingle |
Kovac, Julien Stock, Heinz-Rolf Zoch, Hans-Werner Journal of Surface Engineered Materials and Advanced Technology Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets Management Science and Operations Research Mechanical Engineering Energy Engineering and Power Technology |
| author_sort |
kovac, julien |
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Kovac, Julien Stock, Heinz-Rolf Zoch, Hans-Werner 2161-4881 2161-489X Scientific Research Publishing, Inc. Management Science and Operations Research Mechanical Engineering Energy Engineering and Power Technology http://dx.doi.org/10.4236/jsemat.2012.22018 Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets Journal of Surface Engineered Materials and Advanced Technology |
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Journal of Surface Engineered Materials and Advanced Technology |
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49 |
| title |
Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_unstemmed |
Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_full |
Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_fullStr |
Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_full_unstemmed |
Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_short |
Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_sort |
influence of substrate bias voltage on the properties of sputtered aluminum-scandium thin sheets |
| topic |
Management Science and Operations Research Mechanical Engineering Energy Engineering and Power Technology |
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http://dx.doi.org/10.4236/jsemat.2012.22018 |
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2012 |
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115-119 |
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| author | Kovac, Julien, Stock, Heinz-Rolf, Zoch, Hans-Werner |
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| imprint_str_mv | Scientific Research Publishing, Inc., 2012 |
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| physical | 115-119 |
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| series | Journal of Surface Engineered Materials and Advanced Technology |
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| spelling | Kovac, Julien Stock, Heinz-Rolf Zoch, Hans-Werner 2161-4881 2161-489X Scientific Research Publishing, Inc. Management Science and Operations Research Mechanical Engineering Energy Engineering and Power Technology http://dx.doi.org/10.4236/jsemat.2012.22018 Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets Journal of Surface Engineered Materials and Advanced Technology |
| spellingShingle | Kovac, Julien, Stock, Heinz-Rolf, Zoch, Hans-Werner, Journal of Surface Engineered Materials and Advanced Technology, Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets, Management Science and Operations Research, Mechanical Engineering, Energy Engineering and Power Technology |
| title | Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_full | Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_fullStr | Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_full_unstemmed | Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_short | Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| title_sort | influence of substrate bias voltage on the properties of sputtered aluminum-scandium thin sheets |
| title_unstemmed | Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets |
| topic | Management Science and Operations Research, Mechanical Engineering, Energy Engineering and Power Technology |
| url | http://dx.doi.org/10.4236/jsemat.2012.22018 |