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A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method
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Journal Title: | MATERIALS TRANSACTIONS |
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Authors and Corporations: | , |
In: | MATERIALS TRANSACTIONS, 47, 2006, 3, p. 532-535 |
Type of Resource: | E-Article |
Language: | English |
published: |
Japan Institute of Metals
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Subjects: |