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A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method
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| Zeitschriftentitel: | MATERIALS TRANSACTIONS |
|---|---|
| Personen und Körperschaften: | , |
| In: | MATERIALS TRANSACTIONS, 47, 2006, 3, S. 532-535 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Japan Institute of Metals
|
| Schlagwörter: |
| author_facet |
Zhang, H. J. Qiu, C. J. Zhang, H. J. Qiu, C. J. |
|---|---|
| author |
Zhang, H. J. Qiu, C. J. |
| spellingShingle |
Zhang, H. J. Qiu, C. J. MATERIALS TRANSACTIONS A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method Mechanical Engineering Mechanics of Materials Condensed Matter Physics General Materials Science |
| author_sort |
zhang, h. j. |
| spelling |
Zhang, H. J. Qiu, C. J. 1345-9678 1347-5320 Japan Institute of Metals Mechanical Engineering Mechanics of Materials Condensed Matter Physics General Materials Science http://dx.doi.org/10.2320/matertrans.47.532 A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method MATERIALS TRANSACTIONS |
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MATERIALS TRANSACTIONS |
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| title |
A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_unstemmed |
A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_full |
A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_fullStr |
A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_full_unstemmed |
A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_short |
A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_sort |
a tinicu thin film micropump made by magnetron co-sputtered method |
| topic |
Mechanical Engineering Mechanics of Materials Condensed Matter Physics General Materials Science |
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http://dx.doi.org/10.2320/matertrans.47.532 |
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| author | Zhang, H. J., Qiu, C. J. |
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| institution | DE-Bn3, DE-Brt1, DE-Zwi2, DE-D161, DE-Gla1, DE-Zi4, DE-15, DE-Pl11, DE-Rs1, DE-105, DE-14, DE-Ch1, DE-L229, DE-D275 |
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| physical | 532-535 |
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| spelling | Zhang, H. J. Qiu, C. J. 1345-9678 1347-5320 Japan Institute of Metals Mechanical Engineering Mechanics of Materials Condensed Matter Physics General Materials Science http://dx.doi.org/10.2320/matertrans.47.532 A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method MATERIALS TRANSACTIONS |
| spellingShingle | Zhang, H. J., Qiu, C. J., MATERIALS TRANSACTIONS, A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method, Mechanical Engineering, Mechanics of Materials, Condensed Matter Physics, General Materials Science |
| title | A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_full | A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_fullStr | A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_full_unstemmed | A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_short | A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| title_sort | a tinicu thin film micropump made by magnetron co-sputtered method |
| title_unstemmed | A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method |
| topic | Mechanical Engineering, Mechanics of Materials, Condensed Matter Physics, General Materials Science |
| url | http://dx.doi.org/10.2320/matertrans.47.532 |