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Optimizing Movement Sequences for Step-and-Scan Lithography Equipment
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Journal Title: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
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Authors and Corporations: | , , , |
In: | Journal of Advanced Mechanical Design, Systems, and Manufacturing, 7, 2013, 4, p. 608-618 |
Type of Resource: | E-Article |
Language: | English |
published: |
Japan Society of Mechanical Engineers
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Subjects: |