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Optimizing Movement Sequences for Step-and-Scan Lithography Equipment
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| Zeitschriftentitel: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
|---|---|
| Personen und Körperschaften: | , , , |
| In: | Journal of Advanced Mechanical Design, Systems, and Manufacturing, 7, 2013, 4, S. 608-618 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Japan Society of Mechanical Engineers
|
| Schlagwörter: |
| author_facet |
SHINANO, Yuji INUI, Nobuo FUKAGAWA, Youzou TAKAKURA, Noburu SHINANO, Yuji INUI, Nobuo FUKAGAWA, Youzou TAKAKURA, Noburu |
|---|---|
| author |
SHINANO, Yuji INUI, Nobuo FUKAGAWA, Youzou TAKAKURA, Noburu |
| spellingShingle |
SHINANO, Yuji INUI, Nobuo FUKAGAWA, Youzou TAKAKURA, Noburu Journal of Advanced Mechanical Design, Systems, and Manufacturing Optimizing Movement Sequences for Step-and-Scan Lithography Equipment Industrial and Manufacturing Engineering Mechanical Engineering |
| author_sort |
shinano, yuji |
| spelling |
SHINANO, Yuji INUI, Nobuo FUKAGAWA, Youzou TAKAKURA, Noburu 1881-3054 Japan Society of Mechanical Engineers Industrial and Manufacturing Engineering Mechanical Engineering http://dx.doi.org/10.1299/jamdsm.7.608 Optimizing Movement Sequences for Step-and-Scan Lithography Equipment Journal of Advanced Mechanical Design, Systems, and Manufacturing |
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Journal of Advanced Mechanical Design, Systems, and Manufacturing |
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| title |
Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_unstemmed |
Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_full |
Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_fullStr |
Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_full_unstemmed |
Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_short |
Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_sort |
optimizing movement sequences for step-and-scan lithography equipment |
| topic |
Industrial and Manufacturing Engineering Mechanical Engineering |
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http://dx.doi.org/10.1299/jamdsm.7.608 |
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608-618 |
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| author | SHINANO, Yuji, INUI, Nobuo, FUKAGAWA, Youzou, TAKAKURA, Noburu |
| author_facet | SHINANO, Yuji, INUI, Nobuo, FUKAGAWA, Youzou, TAKAKURA, Noburu, SHINANO, Yuji, INUI, Nobuo, FUKAGAWA, Youzou, TAKAKURA, Noburu |
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| imprint | Japan Society of Mechanical Engineers, 2013 |
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| institution | DE-105, DE-14, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-Zwi2, DE-D161, DE-Gla1, DE-Zi4, DE-15, DE-Pl11, DE-Rs1 |
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| physical | 608-618 |
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| publisher | Japan Society of Mechanical Engineers |
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| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
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| spelling | SHINANO, Yuji INUI, Nobuo FUKAGAWA, Youzou TAKAKURA, Noburu 1881-3054 Japan Society of Mechanical Engineers Industrial and Manufacturing Engineering Mechanical Engineering http://dx.doi.org/10.1299/jamdsm.7.608 Optimizing Movement Sequences for Step-and-Scan Lithography Equipment Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spellingShingle | SHINANO, Yuji, INUI, Nobuo, FUKAGAWA, Youzou, TAKAKURA, Noburu, Journal of Advanced Mechanical Design, Systems, and Manufacturing, Optimizing Movement Sequences for Step-and-Scan Lithography Equipment, Industrial and Manufacturing Engineering, Mechanical Engineering |
| title | Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_full | Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_fullStr | Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_full_unstemmed | Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_short | Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| title_sort | optimizing movement sequences for step-and-scan lithography equipment |
| title_unstemmed | Optimizing Movement Sequences for Step-and-Scan Lithography Equipment |
| topic | Industrial and Manufacturing Engineering, Mechanical Engineering |
| url | http://dx.doi.org/10.1299/jamdsm.7.608 |