Narrow-aperture electron beam in the forevacuum pressure range as a tool for dimensional processing of silica glass

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Bibliographische Detailangaben
Zeitschriftentitel:	MATEC Web of Conferences
Personen und Körperschaften:	Zenin, Aleksey, Klimov, Aleksandr, Bakeev, Ilya
In:	MATEC Web of Conferences, 143, 2018, S. 03006
Format:	E-Article
Sprache:	Unbestimmt
veröffentlicht:	EDP Sciences

Details
Zusammenfassung:	<jats:p>The paper gives overview of the results of using narrow-aperture electron beam generated by a forevacuum plasma electron source as a tool for treatment of electrically non-conductive materials, such as technical glass. Effectiveness of electron beam treatment of non-conductive materials is caused by almost complete neutralization of target charge on the treated surface. Charge neutralization occurs due to ion flow from beam plasma generated while transporting the beam through forevacuum pressure area. The study demonstrates the possibility to control depth and form of milling by changing modes of electron beam treatment. Combined use of electron beam and automated system for beam deflection and sweep makes possible to perform dimensional processing, particularly cutting and milling with complex trajectory. Milling rates were experimentally found depending on treatment time and mode. The suggested method of silica glass treatment represents an alternative for traditional treatment methods.</jats:p>
Umfang:	03006
ISSN:	2261-236X
DOI:	10.1051/matecconf/201814303006