Nanoimprint lithography: principles, processes and materials

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Authors and Corporations:	Lan, Hongbo (Author), Ding, Yucheng (Author), Liu, Hongzhong (Author)
Title:	Nanoimprint lithography: principles, processes and materials/ Hongbo Lan, Yucheng Ding and Hongzhong Liu
Type of Resource:	Book Bibliography
Language:	English
published:	[Hauppauge], NY Nova Science Publishers c 2011
Series:	Nanotechnology science and technology
Subjects:	Nanolithography Nanoelectronics Microlithography Nanostructures Bibliografie
Source:	Verbunddaten SWB