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MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control
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| Zeitschriftentitel: | Micromachines |
|---|---|
| Personen und Körperschaften: | , , , |
| In: | Micromachines, 10, 2019, 4, S. 248 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
MDPI AG
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| Schlagwörter: |
| author_facet |
Cui, Min Huang, Yong Wang, Wei Cao, Huiliang Cui, Min Huang, Yong Wang, Wei Cao, Huiliang |
|---|---|
| author |
Cui, Min Huang, Yong Wang, Wei Cao, Huiliang |
| spellingShingle |
Cui, Min Huang, Yong Wang, Wei Cao, Huiliang Micromachines MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering |
| author_sort |
cui, min |
| spelling |
Cui, Min Huang, Yong Wang, Wei Cao, Huiliang 2072-666X MDPI AG Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering http://dx.doi.org/10.3390/mi10040248 <jats:p>In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper.</jats:p> MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control Micromachines |
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| title |
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_unstemmed |
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_full |
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_fullStr |
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_full_unstemmed |
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_short |
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_sort |
mems gyroscope temperature compensation based on drive mode vibration characteristic control |
| topic |
Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering |
| url |
http://dx.doi.org/10.3390/mi10040248 |
| publishDate |
2019 |
| physical |
248 |
| description |
<jats:p>In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper.</jats:p> |
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| author | Cui, Min, Huang, Yong, Wang, Wei, Cao, Huiliang |
| author_facet | Cui, Min, Huang, Yong, Wang, Wei, Cao, Huiliang, Cui, Min, Huang, Yong, Wang, Wei, Cao, Huiliang |
| author_sort | cui, min |
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| description | <jats:p>In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper.</jats:p> |
| doi_str_mv | 10.3390/mi10040248 |
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| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMzM5MC9taTEwMDQwMjQ4 |
| imprint | MDPI AG, 2019 |
| imprint_str_mv | MDPI AG, 2019 |
| institution | DE-Zi4, DE-Gla1, DE-15, DE-Pl11, DE-Rs1, DE-14, DE-105, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-Zwi2, DE-D161 |
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| issn_str_mv | 2072-666X |
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| physical | 248 |
| publishDate | 2019 |
| publishDateSort | 2019 |
| publisher | MDPI AG |
| record_format | ai |
| recordtype | ai |
| series | Micromachines |
| source_id | 49 |
| spelling | Cui, Min Huang, Yong Wang, Wei Cao, Huiliang 2072-666X MDPI AG Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering http://dx.doi.org/10.3390/mi10040248 <jats:p>In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper.</jats:p> MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control Micromachines |
| spellingShingle | Cui, Min, Huang, Yong, Wang, Wei, Cao, Huiliang, Micromachines, MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control, Electrical and Electronic Engineering, Mechanical Engineering, Control and Systems Engineering |
| title | MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_full | MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_fullStr | MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_full_unstemmed | MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_short | MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| title_sort | mems gyroscope temperature compensation based on drive mode vibration characteristic control |
| title_unstemmed | MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control |
| topic | Electrical and Electronic Engineering, Mechanical Engineering, Control and Systems Engineering |
| url | http://dx.doi.org/10.3390/mi10040248 |