Further processing options
A high-speed electromagnetically-actuated scanner for dual-stage nanopositioning
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Journal Title: | IFAC Proceedings Volumes |
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Authors and Corporations: | , , , , , |
In: | IFAC Proceedings Volumes, 46, 2013, 5, p. 125-130 |
Type of Resource: | E-Article |
Language: | English |
published: |
Elsevier BV
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Subjects: |