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Optimization of Lens Adjustment in Semiconductor Lithography Equipment Using Quadratically Constrained and Second Order Cone Programming(Mechanical Systems)
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Journal Title: | Transactions of the Japan Society of Mechanical Engineers Series C |
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Authors and Corporations: | , , , |
In: | Transactions of the Japan Society of Mechanical Engineers Series C, 75, 2009, 749, p. 157-163 |
Type of Resource: | E-Article |
Language: | English |
published: |
Japan Society of Mechanical Engineers
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Subjects: |