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System-level modeling of MEMS

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Authors and Corporations: Bechtold, Tamara (Editor), Schrag, Gabriele (Other), Feng, Lihong (Other)
Title: System-level modeling of MEMS/ ed. by Tamara Bechtold ...
Type of Resource: Book
Language: English
published:
Weinheim Wiley-VCH-Verl. c 2013
Series: Advanced micro & nanosystems ; 10
Subjects:
Microelectromechanical systems
Microelectromechanical systems > Mathematical models
Aufsatzsammlung
Online-Ausg.: System-level modeling of MEMS, Weinheim : Wiley-VCH, 2013, Online-Ressource
Source: Verbunddaten SWB
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