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System-level modeling of MEMS ed. by Tamara Bechtold ..., Weinheim Wiley-VCH-Verl. c 2013, XXXII, 530 S. Ill., graph. Darst. 24 cm, Text txt rdacontent, ohne Hilfsmittel zu benutzen n rdamedia, Band nc rdacarrier, Advanced micro and nanosystems 10, Literaturangaben, Archivierung/Langzeitarchivierung gewährleistet PEBW pdager DE-31, Microelectromechanical systems, Microelectromechanical systems Mathematical models, Aufsatzsammlung (DE-588)4143413-4 (DE-627)105605727 (DE-576)209726091 gnd-content, s (DE-588)4824724-8 (DE-627)48474433X (DE-576)216760755 MEMS gnd, s (DE-588)4148259-1 (DE-627)105570354 (DE-576)209763132 Computersimulation gnd, s (DE-588)4136085-0 (DE-627)105660167 (DE-576)209666196 Ordnungsreduktion gnd, DE-101, Bechtold, Tamara Hrsg. (DE-627)1259579999 (DE-576)189579994 edt, Schrag, Gabriele 1968- (DE-588)12405661X (DE-627)085609110 (DE-576)293999937 oth, Feng, Lihong oth, 9783527647125 ePDF, 9783527647132 oBook, Online-Ausg. System-level modeling of MEMS Weinheim : Wiley-VCH, 2013 Online-Ressource (DE-627)79020066X (DE-576)9790200668 3527647139 3527647120 9783527647132 9783527647125, Advanced micro & nanosystems 10 10 (DE-627)39192897X (DE-576)111136741 (DE-600)2157335-9 1865-1399, http://www.gbv.de/dms/ilmenau/toc/680340041.PDF V:DE-601 B:DE-ilm1 pdf/application Verlag Inhaltsverzeichnis Inhaltsverzeichnis, http://deposit.d-nb.de/cgi-bin/dokserv?id=3932603&prov=M&dok_var=1&dok_ext=htm X:MVB text/html Verlag Inhaltstext, https://swbplus.bsz-bw.de/bsz37878272xcov.jpg V:DE-576 X:wiley image/jpeg 20130305115508 Cover, DE-Ch1 epn:3078680517 2016-03-08T12:36:45Z, DE-105 epn:3078680630 2013-03-13T09:44:03Z, DE-Zwi2 epn:307868072X 2013-03-15T11:33:05Z |
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System-level modeling of MEMS, Advanced micro & nanosystems, 10, Microelectromechanical systems, Microelectromechanical systems Mathematical models, Mathematical models, Aufsatzsammlung, MEMS, Computersimulation, Ordnungsreduktion |
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title |
System-level modeling of MEMS |
title_auth |
System-level modeling of MEMS |
title_full |
System-level modeling of MEMS ed. by Tamara Bechtold ... |
title_fullStr |
System-level modeling of MEMS ed. by Tamara Bechtold ... |
title_full_unstemmed |
System-level modeling of MEMS ed. by Tamara Bechtold ... |
title_in_hierarchy |
10. System-level modeling of MEMS (c 2013) |
title_short |
System-level modeling of MEMS |
title_sort |
system-level modeling of mems |
title_unstemmed |
System-level modeling of MEMS |
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Microelectromechanical systems, Microelectromechanical systems Mathematical models, Mathematical models, Aufsatzsammlung, MEMS, Computersimulation, Ordnungsreduktion |
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Microelectromechanical systems, Mathematical models, Aufsatzsammlung, MEMS, Computersimulation, Ordnungsreduktion |
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