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Nanofabrication: Principles, Capabilities and Limits

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Personen und Körperschaften: Cui, Zheng (VerfasserIn)
Titel: Nanofabrication: Principles, Capabilities and Limits/ by Zheng Cui
Ausgabe: 2nd ed. 2017
Format: E-Book
Sprache: Englisch
veröffentlicht:
Cham Springer 2017
Gesamtaufnahme: SpringerLink
Springer eBook Collection
Schlagwörter:
Optics
Electrodynamics
Continuum mechanics
Nanotechnology
Electronic circuits
Engineering
Druckausg.: Cui, Zheng, Nanofabrication, Second edition, [Cham] : Springer, 2017, xvii, 432 Seiten
Quelle: Verbunddaten SWB
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contents This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges, 1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies
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spelling Cui, Zheng aut, Nanofabrication Principles, Capabilities and Limits by Zheng Cui, 2nd ed. 2017, Cham Springer 2017, Online-Ressource (XVII, 432 p. 316 illus., 50 illus. in color, online resource), Text txt rdacontent, Computermedien c rdamedia, Online-Ressource cr rdacarrier, SpringerLink Bücher, Springer eBook Collection Engineering, This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges, 1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies, Optics, Electrodynamics, Continuum mechanics, Nanotechnology, Electronic circuits, Engineering, s (DE-588)4327470-5 (DE-627)131523066 (DE-576)211282081 Nanotechnologie gnd, DE-101, (DE-627), 9783319393599, Druckausg. Cui, Zheng Nanofabrication Second edition [Cham] : Springer, 2017 xvii, 432 Seiten (DE-627)865571694 (DE-576)47730799X 3319393596 9783319393599, Printed edition 9783319393599, https://doi.org/10.1007/978-3-319-39361-2 B:SPRINGER Verlag lizenzpflichtig Volltext, https://swbplus.bsz-bw.de/bsz477157513cov.jpg V:DE-576 X:springer image/jpeg 20161004124553 Cover, (DE-627)866793461, http://dx.doi.org/10.1007/978-3-319-39361-2 DE-Ch1, DE-Ch1 epn:340437374X 2016-12-13T00:00:00Z, http://dx.doi.org/10.1007/978-3-319-39361-2 DE-Zwi2, DE-Zwi2 epn:340437388X 2017-02-07T00:00:00Z
spellingShingle Cui, Zheng, Nanofabrication: Principles, Capabilities and Limits, This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges, 1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies, Optics, Electrodynamics, Continuum mechanics, Nanotechnology, Electronic circuits, Engineering, Nanotechnologie
swb_id_str 477157513
title Nanofabrication: Principles, Capabilities and Limits
title_auth Nanofabrication Principles, Capabilities and Limits
title_full Nanofabrication Principles, Capabilities and Limits by Zheng Cui
title_fullStr Nanofabrication Principles, Capabilities and Limits by Zheng Cui
title_full_unstemmed Nanofabrication Principles, Capabilities and Limits by Zheng Cui
title_short Nanofabrication
title_sort nanofabrication principles capabilities and limits
title_sub Principles, Capabilities and Limits
title_unstemmed Nanofabrication: Principles, Capabilities and Limits
topic Optics, Electrodynamics, Continuum mechanics, Nanotechnology, Electronic circuits, Engineering, Nanotechnologie
topic_facet Optics, Electrodynamics, Continuum mechanics, Nanotechnology, Electronic circuits, Engineering, Nanotechnologie
url https://doi.org/10.1007/978-3-319-39361-2, https://swbplus.bsz-bw.de/bsz477157513cov.jpg, http://dx.doi.org/10.1007/978-3-319-39361-2