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Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems

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Authors and Corporations: Xu, Qingsong (Author), Tan, Kok Kiong (Other)
Title: Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems/ by Qingsong Xu, Kok Kiong Tan
Edition: 1st ed. 2016
Type of Resource: E-Book
Language: English
published:
Cham Springer 2016
Series: Advances in Industrial Control
SpringerLink
Springer eBook Collection
Subjects:
Engineering
Industrial engineering
Nanotechnology.
Control engineering.
Production engineering.
Mechatronics.
Source: Verbunddaten SWB