The MEMS handbook, [2] MEMS, design and fabrication

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Title:	The MEMS handbook ([2]); MEMS, design and fabrication/ ed. by Mohamed Gad-el-Hak
Edition:	2. ed.
Type of Resource:	Book
Language:	English
published:	Boca Raton, Fla.[u.a.] CRC [u.a.] 2006
Series:	The MEMS handbook; [2]
Source:	Verbunddaten SWB